Search results for "micromachining"

Hits ?▲	Authors	Title	Venue	Year	Link	Author keywords
2	Ming Xia, Yiliu Tu	An Investigation of Femtosecond Laser Micromachining.	ICMENS	2005	DBLP DOI BibTeX RDF
2	Guangyi Shi, Qiang Huang, Wen J. Li, Wenqian Huang, Gengchen Shi, Kejie Li	Towards Automated Micromachining of PMMA Micro Channels using CO/Sub 2/ Laser and Sacrificial Mask Process.	ICRA	2004	DBLP DOI BibTeX RDF
2	Jae-Geun Oh, Bumkyoo Choi, Seung-Yop Lee	A Monolithically Packaged Cordless Sensor System Embedding MEMS A/D Converter and Saw Transponder.	ICMENS	2004	DBLP DOI BibTeX RDF	SAW radio transponder, Touch mode, Micromachining technology, Wireless sensor, Capacitive sensor
2	Sandrine Lucas, N. Outaleb, Olivier Bonnaud, J. Pine	Realization and SEM Observation of Polysilicon and Aluminium Cantilever Using Surface Micromachining Technology.	MSE	1999	DBLP DOI BibTeX RDF
1	Philipp Blumenthal, Annika Raatz	Adhesive Workpiece Fixturing for Micromachining.	IPAS	2012	DBLP DOI BibTeX RDF
1	R. Mukhiya, A. Bagolini, T. K. Bhattacharyya, L. Lorenzelli, M. Zen	Experimental study and analysis of corner compensation structures for CMOS compatible bulk micromachining using 25 wt% TMAH.	Microelectronics Journal	2011	DBLP DOI BibTeX RDF
1	A. V. Kulkarni, V. K. Jain, K. A. Misra	Electrochemical spark micromachining (microchannels and microholes) of metals and non-metals.	IJMTM	2011	DBLP DOI BibTeX RDF
1	Alok Kumar Das, Partha Saha	Micromachining of silicon with excimer laser in air and water medium.	IJMTM	2010	DBLP DOI BibTeX RDF
1	J. Munda, M. Malapati, B. Bhattacharyya	Investigation into the influence of Electrochemical Micromachining (EMM) parameters on Radial Overcut through RSM-based approach.	IJMTM	2010	DBLP DOI BibTeX RDF
1	Richárd Berényi	Prototyping of a reliable 3D flexible IC cube package by laser micromachining.	Microelectronics Reliability	2009	DBLP DOI BibTeX RDF
1	Mohammad Mayyas, Panos Shiakolas	Microsurface Reverse Engineering and Compensation for Laser Micromachining.	IEEE T. Automation Science and Engineering	2009	DBLP DOI BibTeX RDF
1	C. K. Chung, T. R. Shih, B. H. Wu	Characteristics of truncate-angle rhombic micromixer and rapid mold fabrication using CO2 laser micromachining.	NEMS	2009	DBLP DOI BibTeX RDF
1	Min Miao, Yufeng Jin, Hongguang Liao, Liwei Zhao, Yunhui Zhu, Xin Sun, Yunxia Guo	Research on deep RIE-based through-Si-via micromachining for 3-D system-in-package integration.	NEMS	2009	DBLP DOI BibTeX RDF
1	Tao Chen, Liguo Chen, Lining Sun	Piezoelectrically driven silicon microgrippers integrated with sidewall piezoresistive sensor.	ICRA	2009	DBLP DOI BibTeX RDF
1	Avinash K. Bhaskar, Muthukumaran Packirisamy, Rama B. Bhat	Bulk micromachining for SOI based microsystems using double side XeF2 etching.	IJMTM	2008	DBLP DOI BibTeX RDF
1	Mark J. Jackson, Grant M. Robinson, Mike P. Brady	Micromachining of bipolar plates used in proton exchange membrane fuel cells.	IJMTM	2008	DBLP DOI BibTeX RDF
1	J. Kozak, D. Gulbinowicz, Z. Gulbinowicz	The Mathematical Modeling and Computer Simulation of Pulse Electrochemical Micromachining.	Engineering Letters	2008	DBLP BibTeX RDF
1	Tao Chen, Liguo Chen, Lining Sun, Jiachou Wang, Xinxin Li	A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper.	ICIRA	2008	DBLP DOI BibTeX RDF	Microgripper, Sidewall piezoresistive sensor, MEMS
1	K. P. Zhu, Yoke San Wong, G. S. Hong	Noise-Robust Tool Condition Monitoring in Micro-milling with Hidden Markov Models.	Soft Computing Applications in Industry	2008	DBLP DOI BibTeX RDF
1	Xiang-meng Jing, Di Chen, Dong-ming Fang, Chuang Huang, Jing-Quan Liu, Xiang Chen	Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology.	Microelectronics Journal	2007	DBLP DOI BibTeX RDF
1	R. Hellin-Rico, J.-P. Celis, K. Baert, Chris Van Hoof, Ann Witvrouw	A Generic Surface Micromachining Module for Mems Hermetic Packaging at Temperatures Below 200 degrees C	CoRR	2007	DBLP BibTeX RDF
1	Philippe Cardou, Jorge Angeles	Simplectic Architectures for True Multi-axial Accelerometers: A Novel Application of Parallel Robots.	ICRA	2007	DBLP DOI BibTeX RDF
1	Sohee Kim, Thorsten Knoll, Oliver Scholz	Feasibility of Inductive Communication Between Millimeter-Sized Wireless Robots.	IEEE Transactions on Robotics	2007	DBLP DOI BibTeX RDF
1	K. Biswas, S. Das, D. K. Maurya, S. Kal, S. K. Lahiri	Bulk micromachining of silicon in TMAH-based etchants for aluminum passivation and smooth surface.	Microelectronics Journal	2006	DBLP DOI BibTeX RDF
1	K. Biswas, S. Kal	Etch characteristics of KOH, TMAH and dual doped TMAH for bulk micromachining of silicon.	Microelectronics Journal	2006	DBLP DOI BibTeX RDF
1	Norbert Dumas, Florence Azaïs, Laurent Latorre, Pascal Nouet	Electro-thermal Stimuli for MEMS Testing in FSBM Technology.	J. Electronic Testing	2006	DBLP DOI BibTeX RDF	bulk micromachining, electro-thermal stimuli, testing, defects, MEMS
1	Robert W. Johnstone, M. Parameswaran	Curl and Effective Height of Micromachined Bi-Layer Cantilevers Under Differing Residual Stresses.	CCECE	2006	DBLP DOI BibTeX RDF
1	A. Nurashikin Nordin, Mona E. Zaghloul	Design and implementation of a 1GHz CMOS resonator utilizing surface acoustic wave.	ISCAS	2006	DBLP DOI BibTeX RDF
1	Elena I. Gaura, Robert M. Newman	Wireless Sensor Networks: The Quest for Planetary Field Sensing.	LCN	2006	DBLP DOI BibTeX RDF
1	Vishwanath Natarajan, Soumendu Bhattacharya, Abhijit Chatterjee	Alternate Electrical Tests for Extracting Mechanical Parameters of MEMS Accelerometer Sensors.	VTS	2006	DBLP DOI BibTeX RDF
1	S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi	Fabrication of 128×128 element optical switch array by micromachining technology.	Microprocessors and Microsystems	2005	DBLP DOI BibTeX RDF
1	A. Pavolotsky, D. Meledin, C. Risacher, M. Pantaleev, V. Belitsky	Micromachining approach in fabricating of THz waveguide components.	Microelectronics Journal	2005	DBLP DOI BibTeX RDF
1	S. B. Wang, S. B. Zhou, G. Huang, B. F. Xiong, S. H. Chen, X. J. Yi	Fabrication of 128×128 element optical switch array by micromachining technology.	Microelectronics Journal	2005	DBLP DOI BibTeX RDF
1	Muthukuruman Packirisamy, Ion Stiharu, L. Flores	Roughness characterisation of gas phase micromachining process suitable for fabricating silicon based microsystems.	IJMTM	2005	DBLP DOI BibTeX RDF
1	Ian G. Foulds, M. Parameswaran	Hysteresis Spring Single Digital Input Bistable Mechanism.	ICMENS	2005	DBLP DOI BibTeX RDF	Bistable, Single Input, Surface Micromachining Technology, PolyMUMPS, MEMS
1	Ahmed A. S. Mohammed, Walied A. Moussa	Design and Simulation of One-Port Resonant- Piezoresistive Strain Sensor.	ICMENS	2005	DBLP DOI BibTeX RDF
1	Timothy D. Pope, Christine Alain, Loïc Le Noc, Hubert Jerominek, L. Ngo Phong, W. Zheng	Performance of a 512x3 Pixel Microbolometer Detector for Space Imaging Applications.	ICMENS	2005	DBLP DOI BibTeX RDF
1	Scott Samson, Rahul Agarwal, Sunny Kedia, Weidong Wang, Shinzo Onishi, John Bumgarner	Fabrication Processes for Packaged Optical MEMS Devices.	ICMENS	2005	DBLP DOI BibTeX RDF
1	Rakesh B. Katragadda, Yong Xu	A Novel Intelligent Textile Technology Based on Silicon Flexible Skins.	ISWC	2005	DBLP DOI BibTeX RDF
1	Francisco Tejada, Andreas G. Andreou, Dennis K. Wickenden, Arthur S. Francomacaro	Surface micromachining in Silicon on Sapphire CMOS technology.	ISCAS	2004	DBLP BibTeX RDF
1	Jacob White	CAD challenges in BioMEMS design.	DAC	2004	DBLP DOI BibTeX RDF
1	Kay-Uwe Kirstein, Jan Sedivý, Tomi Salo, Christoph Hagleitner, Tobias Vancura, Andreas Hierlemann	A CMOS-Based Tactile Sensor for Continuous Blood Pressure Monitoring.	DATE	2004	DBLP DOI BibTeX RDF
1	Ranjith Amarasinghe, Dzung Viet Dao, Toshiyuki Toriyama, Susumu Sugiyama	Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications.	ICMENS	2004	DBLP DOI BibTeX RDF
1	Zhishan Hua, Onnop Srivannavit, Yongmei Xia, Erdogan Gulari	A Compact Chemical-Resistant Microvalve Array Using Parylene Membrane and Pneumatic Actuation.	ICMENS	2004	DBLP DOI BibTeX RDF
1	K. Sadek, Walied A. Moussa	Assessment of the Effect of Micro-Fabrication Uncertainties on the Sensitivity of Gas Sensors Using 3-D Finite Element Modeling.	ICMENS	2004	DBLP DOI BibTeX RDF
1	Guangfen Wei, Zhenan Tang, Philip C. H. Chan, Jun Yu	A Blind Source Separation Based Micro Gas Sensor Array Modeling Method.	ISNN	2004	DBLP DOI BibTeX RDF
1	Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus	A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process.	International Journal of Computational Engineering Science	2003	DBLP DOI BibTeX RDF
1	Thomas Gessner, Andreas Bertz, Christian Lohmann, Steffen Kurth, Karla Hiller	Advanced Silicon Micromachining.	International Journal of Computational Engineering Science	2003	DBLP DOI BibTeX RDF
1	Hong Zhu, Jianmin Miao, Bangtao Chen, Zhihong Wang, Weiguan Zhu	Micromachining Process Of Piezoelectric Microcantilever Using Pzt Thin Film.	International Journal of Computational Engineering Science	2003	DBLP DOI BibTeX RDF
1	Robert Fedosejevs, Michael A. Argument, Arzu Sardarli, Sean E. Kirkwood, Robert Holenstein, Ying Y. Tsui	Laser Micromachining for Microfluidic, Microelectronic and MEMS Applications. (PDF / PS)	ICMENS	2003	DBLP DOI BibTeX RDF
1	Diego Ruben Barrettino, Markus Graf, Martin Zimmermann, Christoph Hagleitner, Andreas Hierlemann, Henry Baltes	A micro-hotplate-based monolithic CMOS gas sensor array.	ISCAS	2003	DBLP DOI BibTeX RDF
1	Christoph Hagleitner, Diego Ruben Barrettino, Andreas Hierlemann, O. Brand, Henry Baltes	Interface circuitry for CMOS-based monolithic gas sensor arrays.	ISCAS	2003	DBLP DOI BibTeX RDF
1	Gary K. Fedder	MEMS Fabrication.	ITC	2003	DBLP DOI BibTeX RDF
1	Jeremy A. Walraven	Failure Mechanisms in MEMS.	ITC	2003	DBLP DOI BibTeX RDF
1	Adrian M. Ionescu, V. Pott, R. Fritschi, Kaustav Banerjee, Michel J. Declercq, P. Renaud, C. Hibert, Philippe Flückiger, G. A. Racine	Modeling and Design of a Low-Voltage SOI Suspended-Gate MOSFET (SG-MOSFET) with a Metal-over-Gate Architecture. (PDF / PS)	ISQED	2002	DBLP DOI BibTeX RDF
1	Benoît Charlot, Salvador Mir, Fabien Parrain, Bernard Courtois	Generation of Electrically Induced Stimuli for MEMS Self-Test.	J. Electronic Testing	2001	DBLP DOI BibTeX RDF	MEMS test case-studies, MEMS failure mechanisms, BIST, self-test
1	Khalil Najafi	Low-power micromachined microsystems (invited talk).	ISLPED	2000	DBLP DOI BibTeX RDF	micromachining, power sources, low-power, MEMS, energy harvesting, microsystems
1	Salvador Mir, Benoît Charlot, Gabriela Nicolescu, Philippe Coste, Fabien Parrain, Nacer-Eddine Zergainoh, Bernard Courtois, Ahmed Amine Jerraya, Márta Rencz	Towards design and validation of mixed-technology SOCs.	ACM Great Lakes Symposium on VLSI	2000	DBLP DOI BibTeX RDF	design, verification, MEMS, SOCs, architecture exploration, HDLs, cosimulation
1	Elena I. Gaura, Richard J. Rider, Nigel Steele	Developing Smart Micromachined Transducers Using Feed-Forward Neural Networks: A System Identification and Control Perspective.	IJCNN	2000	DBLP DOI BibTeX RDF
1	Salvador Mir, Benoît Charlot, Bernard Courtois	Extending Fault-Based Testing to Microelectromechanical Systems.	J. Electronic Testing	2000	DBLP DOI BibTeX RDF	nodal simulation, fault modeling, fault simulation, defects, MEMS, HDLs, failure modes
1	A. Castillejo, D. Veychard, Salvador Mir, Jean-Michel Karam, Bernard Courtois	Failure mechanisms and fault classes for CMOS-compatible microelectromechanical systems.	ITC	1998	DBLP DOI BibTeX RDF