Search    Browse

The FacetedDBLP logo    Search for: in:

Disable automatic phrases ?     Syntactic query expansion: ?

Searching for phrase short cycle time chemical vapor deposition reactor (changed automatically) with no syntactic query expansion in all metadata.

Publication years (Num. hits)
1997 (1)
Publication types (Num. hits)
inproceedings(1)
Venues (Conferences, Journals, ...)
Annual Simulation Symposium(1)
Authors
C. D. Moen(1) C. H. Tong(1) Juan C. Meza(1)
GrowBag graphs for keyword ? (Num. hits/coverage)

Group by:
The graphs summarize 3 occurrences of 3 keywords
Results
Found 1 publication records. Showing 1 according to the selection in the facets
Hits ?▲ Authors Title Venue Year Link Author keywords
1C. H. Tong, Juan C. Meza, C. D. Moen Simulation of equipment design optimisation in microelectronics manufacturing. Search on Bibsonomy Annual Simulation Symposium The full citation details ... 1997 DBLP  DOI  BibTeX  RDF equipment design optimisation simulation, microelectronics manufacturing, mathematical formulations, object oriented simulation environment, parametric study, short cycle time chemical vapor deposition reactor, numerical optimization problems, heat conduction, species transport simulation codes, modern optimization software, object oriented optimization environment, software architecture, optimization problems, integrated circuit manufacture
Displaying result #1 - #1 of 1 (100 per page; Change: )
Valid XHTML 1.1! Valid CSS! [Valid RSS]
Maintained by Jörg Diederich.
Based upon DBLP by Michael Ley.