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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/anss/TongMM97>
dc:creator <http://dblp.l3s.de/d2r/resource/authors/C._D._Moen>
dc:creator <http://dblp.l3s.de/d2r/resource/authors/C._H._Tong>
dc:creator <http://dblp.l3s.de/d2r/resource/authors/Juan_C._Meza>
foaf:homepage <http://doi.ieeecomputersociety.org/10.1109/SIMSYM.1997.586498>
foaf:homepage <http://dx.doi.org/10.1109%2FSIMSYM.1997.586498>
dc:identifier DBLP conf/anss/TongMM97 (xsd:string)
dc:identifier DOI 10.1109%2FSIMSYM.1997.586498 (xsd:string)
dcterms:issued 1997 (xsd:gYear)
rdfs:label Simulation of equipment design optimisation in microelectronics manufacturing. (xsd:string)
foaf:maker <http://dblp.l3s.de/d2r/resource/authors/C._D._Moen>
foaf:maker <http://dblp.l3s.de/d2r/resource/authors/C._H._Tong>
foaf:maker <http://dblp.l3s.de/d2r/resource/authors/Juan_C._Meza>
swrc:pages 92-101 (xsd:string)
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owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/anss/TongMM97/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/anss/TongMM97>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/anss/anss1997.html#TongMM97>
rdfs:seeAlso <http://doi.ieeecomputersociety.org/10.1109/SIMSYM.1997.586498>
swrc:series <http://dblp.l3s.de/d2r/resource/conferences/anss>
dc:subject integrated circuit manufacture; equipment design optimisation simulation; microelectronics manufacturing; mathematical formulations; object oriented simulation environment; parametric study; short cycle time chemical vapor deposition reactor; numerical optimization problems; software architecture; optimization problems; heat conduction; species transport simulation codes; modern optimization software; object oriented optimization environment (xsd:string)
dc:title Simulation of equipment design optimisation in microelectronics manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document