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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/3dic/BourjotSDLRBRSB19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amadine_Jouve>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christophe_Dubarry>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Cl%E2%88%9A%C2%A9ment_Castan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._Scevola>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/E._Lagoutte>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/E._Rolland>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Emilie_Bourjot>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Frank_Fournel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Romano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ga%E2%88%9A%C4%99lle_Mauguen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C2%A9r%E2%88%9A%C4%ABme_Dechamp>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lo%E2%88%9A%C4%AEc_Sanchez>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marc_Zussy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nicolas_Bresson>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paul_Stewart>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S%E2%88%9A%C2%A9verine_Cheramy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Viorel_Balan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F3DIC48104.2019.9058783>
foaf:homepage <https://doi.org/10.1109/3DIC48104.2019.9058783>
dc:identifier DBLP conf/3dic/BourjotSDLRBRSB19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F3DIC48104.2019.9058783 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amadine_Jouve>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christophe_Dubarry>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Cl%E2%88%9A%C2%A9ment_Castan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._Scevola>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/E._Lagoutte>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/E._Rolland>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Emilie_Bourjot>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Frank_Fournel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Romano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ga%E2%88%9A%C4%99lle_Mauguen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C2%A9r%E2%88%9A%C4%ABme_Dechamp>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lo%E2%88%9A%C4%AEc_Sanchez>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marc_Zussy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nicolas_Bresson>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paul_Stewart>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S%E2%88%9A%C2%A9verine_Cheramy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Viorel_Balan>
swrc:pages 1-5 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/3dic/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/3dic/BourjotSDLRBRSB19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/3dic/BourjotSDLRBRSB19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/3dic/3dic2019.html#BourjotSDLRBRSB19>
rdfs:seeAlso <https://doi.org/10.1109/3DIC48104.2019.9058783>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/3dic>
dc:title Towards a Complete Direct Hybrid Bonding D2W Integration Flow: Known-Good-Dies and Die Planarization Modules Development. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document