[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/3dic/MatsudairaSSISS19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Satoru_Shimizu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shoso_Shinguhara>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shunsuke_Shindo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Ito>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Taro_Matsudaira>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tomohiro_Shimizu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F3DIC48104.2019.9058791>
foaf:homepage <https://doi.org/10.1109/3DIC48104.2019.9058791>
dc:identifier DBLP conf/3dic/MatsudairaSSISS19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F3DIC48104.2019.9058791 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Cu Diffusion Barrier Properties of Various CoWB Electroless Plated Films on SiO2/Si Substrate for Via-last TSV Application. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Satoru_Shimizu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shoso_Shinguhara>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shunsuke_Shindo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Ito>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Taro_Matsudaira>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tomohiro_Shimizu>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/3dic/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/3dic/MatsudairaSSISS19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/3dic/MatsudairaSSISS19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/3dic/3dic2019.html#MatsudairaSSISS19>
rdfs:seeAlso <https://doi.org/10.1109/3DIC48104.2019.9058791>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/3dic>
dc:title Cu Diffusion Barrier Properties of Various CoWB Electroless Plated Films on SiO2/Si Substrate for Via-last TSV Application. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document