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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/3dic/MiyazakiSUA09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chuichi_Miyazaki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haruo_Shimamoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshihide_Uematsu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshiyuki_Abe>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F3DIC.2009.5306548>
foaf:homepage <https://doi.org/10.1109/3DIC.2009.5306548>
dc:identifier DBLP conf/3dic/MiyazakiSUA09 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F3DIC.2009.5306548 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label Development of wafer thinning and dicing technology for thin wafer. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chuichi_Miyazaki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haruo_Shimamoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshihide_Uematsu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshiyuki_Abe>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/3dic/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/3dic/MiyazakiSUA09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/3dic/MiyazakiSUA09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/3dic/3dic2009.html#MiyazakiSUA09>
rdfs:seeAlso <https://doi.org/10.1109/3DIC.2009.5306548>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/3dic>
dc:title Development of wafer thinning and dicing technology for thin wafer. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document