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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/3dic/TakigawaNIKHKA15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akihiro_Ikeda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kohei_Nitta>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michio_Komatsu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mitsuaki_Kumazawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ryo_Takigawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tanemasa_Asano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiharu_Hirai>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2F3DIC.2015.7334570>
foaf:homepage <https://doi.org/10.1109/3DIC.2015.7334570>
dc:identifier DBLP conf/3dic/TakigawaNIKHKA15 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2F3DIC.2015.7334570 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label High-speed via hole filling using electrophoresis of Ag nanoparticles. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akihiro_Ikeda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kohei_Nitta>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michio_Komatsu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mitsuaki_Kumazawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ryo_Takigawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tanemasa_Asano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiharu_Hirai>
swrc:pages TS5.4.1-TS5.4.4 (xsd:string)
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/3dic/3dic2015.html#TakigawaNIKHKA15>
rdfs:seeAlso <https://doi.org/10.1109/3DIC.2015.7334570>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/3dic>
dc:title High-speed via hole filling using electrophoresis of Ag nanoparticles. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document