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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/IEEEcgiv/LeeLLL08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Byung-Gook_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Joon-Jae_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jung_Woo_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Liliana>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCGIV.2008.23>
foaf:homepage <https://doi.org/10.1109/CGIV.2008.23>
dc:identifier DBLP conf/IEEEcgiv/LeeLLL08 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCGIV.2008.23 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
rdfs:label Position Error Inspection for Mounting Wafer in Cleaning Device. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Byung-Gook_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Joon-Jae_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jung_Woo_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Liliana>
swrc:pages 280-285 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/IEEEcgiv/2008>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/IEEEcgiv/LeeLLL08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/IEEEcgiv/LeeLLL08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/IEEEcgiv/cgiv2008.html#LeeLLL08>
rdfs:seeAlso <https://doi.org/10.1109/CGIV.2008.23>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/IEEEcgiv>
dc:title Position Error Inspection for Mounting Wafer in Cleaning Device. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document