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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/IEEEcit/MatsunawaNSMTTTSH07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eiichi_Takahashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hidenori_Sakanashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hirokazu_Nosato>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Murakawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Osamu_Suga>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tetsuaki_Matsunawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tetsuya_Higuchi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshihiko_Tanaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tsuneo_Terasawa>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCIT.2007.133>
foaf:homepage <https://doi.org/10.1109/CIT.2007.133>
dc:identifier DBLP conf/IEEEcit/MatsunawaNSMTTTSH07 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCIT.2007.133 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
rdfs:label Adaptive Optical Proximity Correction Using an Optimization Method. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eiichi_Takahashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hidenori_Sakanashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hirokazu_Nosato>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Murakawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Osamu_Suga>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tetsuaki_Matsunawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tetsuya_Higuchi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshihiko_Tanaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tsuneo_Terasawa>
swrc:pages 853-860 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/IEEEcit/2007>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/IEEEcit/IEEEcit2007.html#MatsunawaNSMTTTSH07>
rdfs:seeAlso <https://doi.org/10.1109/CIT.2007.133>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/IEEEcit>
dc:title Adaptive Optical Proximity Correction Using an Optimization Method. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document