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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/IEEEssd/FaresSL22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amara_Saad>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fares_Kanouni>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Farouk_Laidoudi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSSD54932.2022.9955880>
foaf:homepage <https://doi.org/10.1109/SSD54932.2022.9955880>
dc:identifier DBLP conf/IEEEssd/FaresSL22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSSD54932.2022.9955880 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Thin film bulk acoustic resonators based on c-axis tilted yttrium-doped AlN for Viscosity sensors. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amara_Saad>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fares_Kanouni>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Farouk_Laidoudi>
swrc:pages 1715-1720 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/IEEEssd/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/IEEEssd/FaresSL22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/IEEEssd/FaresSL22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/IEEEssd/ssd2022.html#FaresSL22>
rdfs:seeAlso <https://doi.org/10.1109/SSD54932.2022.9955880>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/IEEEssd>
dc:title Thin film bulk acoustic resonators based on c-axis tilted yttrium-doped AlN for Viscosity sensors. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document