Design and Control of 3-DOF Reluctance-force-type Magnetic Levitator Module for Fine-positioning Short-stroke Stage.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/aimech/YoonJKPSY23
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Design and Control of 3-DOF Reluctance-force-type Magnetic Levitator Module for Fine-positioning Short-stroke Stage.
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Design and Control of 3-DOF Reluctance-force-type Magnetic Levitator Module for Fine-positioning Short-stroke Stage.
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