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dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kurt_G._Eyink>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._S._Soclof>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Steven_R._LeClair>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoh-Han_Pao>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fb978-0-08-042236-7.50022-5>
foaf:homepage <https://doi.org/10.1016/b978-0-08-042236-7.50022-5>
dc:identifier DBLP conf/airtc/ParkPELS94 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fb978-0-08-042236-7.50022-5 (xsd:string)
dcterms:issued 1994 (xsd:gYear)
rdfs:label Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gwang_Hoon_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kurt_G._Eyink>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._S._Soclof>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Steven_R._LeClair>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoh-Han_Pao>
swrc:pages 123-128 (xsd:string)
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dc:title Neural-Net Based Optical Ellipsometry for Monitoring Growth of Semiconductor Films. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document