Integrated opto-mechanical modeling with scene-based metrology techniques for structural dynamics compensation.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/amcc/FahnestockFE04
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Integrated opto-mechanical modeling with scene-based metrology techniques for structural dynamics compensation.
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Integrated opto-mechanical modeling with scene-based metrology techniques for structural dynamics compensation.
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