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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/amcc/FlemingKL10>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_J._Fleming>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Brian_J._Kenton>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kam_K._Leang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACC.2010.5530950>
foaf:homepage <https://doi.org/10.1109/ACC.2010.5530950>
dc:identifier DBLP conf/amcc/FlemingKL10 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACC.2010.5530950 (xsd:string)
dcterms:issued 2010 (xsd:gYear)
rdfs:label Ultra-fast dual-stage vertical positioning for high performance SPMs. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_J._Fleming>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Brian_J._Kenton>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kam_K._Leang>
swrc:pages 4975-4980 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/amcc/2010>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/amcc/FlemingKL10/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/amcc/FlemingKL10>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/amcc/acc2010.html#FlemingKL10>
rdfs:seeAlso <https://doi.org/10.1109/ACC.2010.5530950>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/amcc>
dc:title Ultra-fast dual-stage vertical positioning for high performance SPMs. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document