Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/amcc/MerryUKMVS08
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Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage.
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Modeling, identification and control of a metrological Atomic Force Microscope with a 3DOF stage.
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