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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/amcc/YanZL09>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qingze_Zou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yan_Yan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhiqun_Lin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACC.2009.5160378>
foaf:homepage <https://doi.org/10.1109/ACC.2009.5160378>
dc:identifier DBLP conf/amcc/YanZL09 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACC.2009.5160378 (xsd:string)
dcterms:issued 2009 (xsd:gYear)
rdfs:label A control approach to high-speed probe-based nanofabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qingze_Zou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yan_Yan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhiqun_Lin>
swrc:pages 295-300 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/amcc/2009>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/amcc/YanZL09/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/amcc/YanZL09>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/amcc/acc2009.html#YanZL09>
rdfs:seeAlso <https://doi.org/10.1109/ACC.2009.5160378>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/amcc>
dc:title A control approach to high-speed probe-based nanofabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document