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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/asiasim/HanPCL04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chilgee_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dongsik_Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sangwon_Chae>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Youngshin_Han>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F978-3-540-30585-9%5F57>
foaf:homepage <https://doi.org/10.1007/978-3-540-30585-9_57>
dc:identifier DBLP conf/asiasim/HanPCL04 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F978-3-540-30585-9%5F57 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
rdfs:label Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems). (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chilgee_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dongsik_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sangwon_Chae>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Youngshin_Han>
swrc:pages 514-520 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/asiasim/2004>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/asiasim/HanPCL04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/asiasim/HanPCL04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/asiasim/asiasim2004.html#HanPCL04>
rdfs:seeAlso <https://doi.org/10.1007/978-3-540-30585-9_57>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/asiasim>
dc:title Full Fabrication Simulation of 300mm Wafer Focused on AMHS (Automated Material Handling Systems). (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document