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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/asicon/WangLSCYWXZ21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chunlei_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_Wei_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dawei_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jingwen_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kun_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xin_Sun>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FASICON52560.2021.9620270>
foaf:homepage <https://doi.org/10.1109/ASICON52560.2021.9620270>
dc:identifier DBLP conf/asicon/WangLSCYWXZ21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FASICON52560.2021.9620270 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Channel Stress Engineering Through Source/Drain Recess Optimization and Its Process Variation Study for 5 nm-node FinFETs. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chunlei_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_Wei_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dawei_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jingwen_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kun_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Min_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xin_Sun>
swrc:pages 1-4 (xsd:string)
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/asicon/asicon2021.html#WangLSCYWXZ21>
rdfs:seeAlso <https://doi.org/10.1109/ASICON52560.2021.9620270>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/asicon>
dc:title Channel Stress Engineering Through Source/Drain Recess Optimization and Its Process Variation Study for 5 nm-node FinFETs. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document