Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/aspdac/FangTC15
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Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning.
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Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning.
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