Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/aspdac/XiaoLWZ16
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Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout.
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Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout.
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