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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ats/SakataTSO99>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Takahashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takahide_Sakata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tetsu_Sekine>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiya_Ogiwara>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FATS.1999.810780>
foaf:homepage <https://doi.org/10.1109/ATS.1999.810780>
dc:identifier DBLP conf/ats/SakataTSO99 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FATS.1999.810780 (xsd:string)
dcterms:issued 1999 (xsd:gYear)
rdfs:label Investigation of Ga Contamination Due to Analysis by Dual Beam FIB. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Takahashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takahide_Sakata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tetsu_Sekine>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiya_Ogiwara>
swrc:pages 389-393 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ats/1999>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ats/SakataTSO99/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ats/SakataTSO99>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ats/ats1999.html#SakataTSO99>
rdfs:seeAlso <https://doi.org/10.1109/ATS.1999.810780>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ats>
dc:subject FIB, Gallium contamination, Silicon wafer, Ion milling, TRXRF, XPS, WDX, AES, ICP-MS (xsd:string)
dc:title Investigation of Ga Contamination Due to Analysis by Dual Beam FIB. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document