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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ausai/KimSK06>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jihyun_Kim_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sanghyeok_Seo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sung-Shick_Kim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F11941439%5F63>
foaf:homepage <https://doi.org/10.1007/11941439_63>
dc:identifier DBLP conf/ausai/KimSK06 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F11941439%5F63 (xsd:string)
dcterms:issued 2006 (xsd:gYear)
rdfs:label Neural Networks Fusion to Overlay Control System for Lithography Process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jihyun_Kim_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sanghyeok_Seo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sung-Shick_Kim>
swrc:pages 587-596 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ausai/2006>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ausai/KimSK06/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ausai/KimSK06>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ausai/ausai2006.html#KimSK06>
rdfs:seeAlso <https://doi.org/10.1007/11941439_63>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ausai>
dc:subject Neural Networks, Lithography, Run-to-Run Control. (xsd:string)
dc:title Neural Networks Fusion to Overlay Control System for Lithography Process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document