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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/case/LeeL11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun-Ho_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCASE.2011.6042519>
foaf:homepage <https://doi.org/10.1109/CASE.2011.6042519>
dc:identifier DBLP conf/case/LeeL11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCASE.2011.6042519 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Concurrent processing of multiple wafer types in a single-armed cluster tool. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun-Ho_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
swrc:pages 102-107 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/case/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/case/LeeL11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/case/LeeL11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/case/case2011.html#LeeL11>
rdfs:seeAlso <https://doi.org/10.1109/CASE.2011.6042519>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/case>
dc:title Concurrent processing of multiple wafer types in a single-armed cluster tool. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document