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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/case/MorrisonM07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Maruthi_Kumar_Mutnuri>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCOASE.2007.4341741>
foaf:homepage <https://doi.org/10.1109/COASE.2007.4341741>
dc:identifier DBLP conf/case/MorrisonM07 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCOASE.2007.4341741 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
rdfs:label On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Maruthi_Kumar_Mutnuri>
swrc:pages 88-93 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/case/2007>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/case/MorrisonM07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/case/MorrisonM07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/case/case2007.html#MorrisonM07>
rdfs:seeAlso <https://doi.org/10.1109/COASE.2007.4341741>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/case>
dc:title On the Throughput of Clustered Photolithography Tools: Wafer Advancement and Intrinsic Equipment Loss. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document