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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/case/PurwinsNBHKLPW11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Nagi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andreas_Kyek>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Benjamin_Lenz>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bernd_Barak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gunter_Pfeifer>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hendrik_Purwins>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kurt_Weinzierl>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Uwe_Hockele>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCASE.2011.6042426>
foaf:homepage <https://doi.org/10.1109/CASE.2011.6042426>
dc:identifier DBLP conf/case/PurwinsNBHKLPW11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCASE.2011.6042426 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Regression methods for prediction of PECVD Silicon Nitride layer thickness. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Nagi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andreas_Kyek>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Benjamin_Lenz>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bernd_Barak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gunter_Pfeifer>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hendrik_Purwins>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kurt_Weinzierl>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Uwe_Hockele>
swrc:pages 387-392 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/case/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/case/PurwinsNBHKLPW11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/case/PurwinsNBHKLPW11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/case/case2011.html#PurwinsNBHKLPW11>
rdfs:seeAlso <https://doi.org/10.1109/CASE.2011.6042426>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/case>
dc:title Regression methods for prediction of PECVD Silicon Nitride layer thickness. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document