Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/cce/Alarcon-SalazarARF12
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Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering.
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Characterization and fabrication of SiOx nano-metric films, obtained by reactive sputtering.
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