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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/cdc/HarirchiVSPS13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anand_Subramanian_0003>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Broc_Stirton>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Farshad_Harirchi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kameshwar_Poolla>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tyrone_Vincent>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCDC.2013.6761002>
foaf:homepage <https://doi.org/10.1109/CDC.2013.6761002>
dc:identifier DBLP conf/cdc/HarirchiVSPS13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCDC.2013.6761002 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Characterizing and resolving unobservability in run-to-run control of high mix semiconductor manufacturing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anand_Subramanian_0003>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Broc_Stirton>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Farshad_Harirchi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kameshwar_Poolla>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tyrone_Vincent>
swrc:pages 7022-7027 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/cdc/2013>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/cdc/cdc2013.html#HarirchiVSPS13>
rdfs:seeAlso <https://doi.org/10.1109/CDC.2013.6761002>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/cdc>
dc:title Characterizing and resolving unobservability in run-to-run control of high mix semiconductor manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document