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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/csit/ProkhorovPFK20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nataliia_Kunanets>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oleg_Fedorovich>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oleksandr_V._Prokhorov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yurii_Pronchakov>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FCSIT49958.2020.9321926>
foaf:homepage <https://doi.org/10.1109/CSIT49958.2020.9321926>
dc:identifier DBLP conf/csit/ProkhorovPFK20 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FCSIT49958.2020.9321926 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Modeling of Technological Process in Nanoelectronic Production. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nataliia_Kunanets>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oleg_Fedorovich>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oleksandr_V._Prokhorov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yurii_Pronchakov>
swrc:pages 324-327 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/csit/2020-1>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/csit/ProkhorovPFK20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/csit/ProkhorovPFK20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/csit/csit2020-1.html#ProkhorovPFK20>
rdfs:seeAlso <https://doi.org/10.1109/CSIT49958.2020.9321926>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/csit>
dc:title Modeling of Technological Process in Nanoelectronic Production. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document