Toward a methodology for manufacturability-driven design rule exploration.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/dac/CapodieciGKSY04
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2004
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Toward a methodology for manufacturability-driven design rule exploration.
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OPC, RET, VLSI manufacturability, lithography, process variation, yield
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Toward a methodology for manufacturability-driven design rule exploration.
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