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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/dac/DingCM15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chris_C._N._Chu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wai-Kei_Mak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yixiao_Ding>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F2744769.2744821>
foaf:homepage <https://doi.org/10.1145/2744769.2744821>
dc:identifier DBLP conf/dac/DingCM15 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F2744769.2744821 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chris_C._N._Chu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wai-Kei_Mak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yixiao_Ding>
swrc:pages 69:1-69:6 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/dac/2015>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/dac/DingCM15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/dac/DingCM15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/dac/dac2015.html#DingCM15>
rdfs:seeAlso <https://doi.org/10.1145/2744769.2744821>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:title Detailed routing for spacer-is-metal type self-aligned double/quadruple patterning lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document