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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/dac/Du0SSLMW13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alexander_Miloslavsky>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gerard_Luk-Pat>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hua_Song>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_P._Shiely>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Martin_D._F._Wong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qiang_Ma_0002>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuelin_Du>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F2463209.2488848>
foaf:homepage <https://doi.org/10.1145/2463209.2488848>
dc:identifier DBLP conf/dac/Du0SSLMW13 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F2463209.2488848 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alexander_Miloslavsky>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gerard_Luk-Pat>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hua_Song>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_P._Shiely>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Martin_D._F._Wong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qiang_Ma_0002>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuelin_Du>
swrc:pages 93:1-93:6 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/dac/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/dac/Du0SSLMW13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/dac/Du0SSLMW13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/dac/dac2013.html#Du0SSLMW13>
rdfs:seeAlso <https://doi.org/10.1145/2463209.2488848>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:title Spacer-is-dielectric-compliant detailed routing for self-aligned double patterning lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document