[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/dac/GuptaKSY03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_B._Kahng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dennis_Sylvester>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jie_Yang_0010>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Puneet_Gupta_0001>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F775832.775840>
foaf:homepage <https://doi.org/10.1145/775832.775840>
dc:identifier DBLP conf/dac/GuptaKSY03 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F775832.775840 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label A cost-driven lithographic correction methodology based on off-the-shelf sizing tools. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_B._Kahng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dennis_Sylvester>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jie_Yang_0010>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Puneet_Gupta_0001>
swrc:pages 16-21 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/dac/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/dac/GuptaKSY03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/dac/GuptaKSY03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/dac/dac2003.html#GuptaKSY03>
rdfs:seeAlso <https://doi.org/10.1145/775832.775840>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:subject OPC, RET, VLSI manufacturability, lithography, yield (xsd:string)
dc:title A cost-driven lithographic correction methodology based on off-the-shelf sizing tools. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document