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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/dac/KurzwegLMMPC99>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Donald_M._Chiarulli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jose_A._Martinez>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kurt_R._Prough>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philippe_J._Marchand>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Steven_P._Levitan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Timothy_P._Kurzweg>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F309847.310092>
foaf:homepage <https://doi.org/10.1145/309847.310092>
dc:identifier DBLP conf/dac/KurzwegLMMPC99 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F309847.310092 (xsd:string)
dcterms:issued 1999 (xsd:gYear)
rdfs:label A CAD Tool for Optical MEMS. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Donald_M._Chiarulli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jose_A._Martinez>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kurt_R._Prough>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philippe_J._Marchand>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Steven_P._Levitan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Timothy_P._Kurzweg>
swrc:pages 879-884 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/dac/1999>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/dac/KurzwegLMMPC99/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/dac/KurzwegLMMPC99>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/dac/dac99.html#KurzwegLMMPC99>
rdfs:seeAlso <https://doi.org/10.1145/309847.310092>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:subject MEMS-CAD, MOEMS, micro-optics, optical MEMS (xsd:string)
dc:title A CAD Tool for Optical MEMS. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document