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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/dac/LiuCCJ14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chi-Yuan_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hui-Ju_Katherine_Chiang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jie-Hong_R._Jiang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yao-Wen_Chang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F2593069.2593215>
foaf:homepage <https://doi.org/10.1145/2593069.2593215>
dc:identifier DBLP conf/dac/LiuCCJ14 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F2593069.2593215 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
rdfs:label Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chi-Yuan_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hui-Ju_Katherine_Chiang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jie-Hong_R._Jiang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yao-Wen_Chang>
swrc:pages 54:1-54:6 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/dac/2014>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/dac/LiuCCJ14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/dac/LiuCCJ14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/dac/dac2014.html#LiuCCJ14>
rdfs:seeAlso <https://doi.org/10.1145/2593069.2593215>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:title Simultaneous EUV Flare Variation Minimization and CMP Control with Coupling-Aware Dummification. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document