Phase correct routing for alternating phase shift masks. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

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dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/conf/dac/McCullen04>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Kevin_W._McCullen>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1145%2F996566.996659>
foaf:homepage	<https://doi.org/10.1145/996566.996659>
dc:identifier	DBLP conf/dac/McCullen04 (xsd:string)
dc:identifier	DOI doi.org%2F10.1145%2F996566.996659 (xsd:string)
dcterms:issued	2004 (xsd:gYear)
rdfs:label	Phase correct routing for alternating phase shift masks. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Kevin_W._McCullen>
swrc:pages	317-320 (xsd:string)
dcterms:partOf	<https://dblp.l3s.de/d2r/resource/publications/conf/dac/2004>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/conf/dac/McCullen04/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/conf/dac/McCullen04>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/conf/dac/dac2004.html#McCullen04>
rdfs:seeAlso	<https://doi.org/10.1145/996566.996659>
swrc:series	<https://dblp.l3s.de/d2r/resource/conferences/dac>
dc:subject	layout, lithography, resolution enhancement techniques (RET), routing (xsd:string)
dc:title	Phase correct routing for alternating phase shift masks. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:InProceedings
rdf:type	foaf:Document