Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/drc/AmltaLMG18
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Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI.
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Epitaxial Gd2O3on Si (111) Substrate by Sputtering to Enable Low Cost SOI.
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