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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/drc/IslamMDLGSWSDTL22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Adam_Miesle>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ahmad_Islam>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_J._Green>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Daniel_Dryden>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/G._Subramanyam>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kelson_D._Chabak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kevin_D._Leedy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kyle_J._Liddy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Dietz>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nicholas_Sepelak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Ganguli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stephen_E._Tetlak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weisong_Wang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FDRC55272.2022.9855795>
foaf:homepage <https://doi.org/10.1109/DRC55272.2022.9855795>
dc:identifier DBLP conf/drc/IslamMDLGSWSDTL22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FDRC55272.2022.9855795 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Thermal stability of ALD-grown SiO2 and Al2O3 on (010) ő≤-Ga2O3 substrates. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Adam_Miesle>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ahmad_Islam>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_J._Green>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Daniel_Dryden>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/G._Subramanyam>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kelson_D._Chabak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kevin_D._Leedy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kyle_J._Liddy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Dietz>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nicholas_Sepelak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Ganguli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stephen_E._Tetlak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weisong_Wang>
swrc:pages 1-2 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/drc/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/drc/IslamMDLGSWSDTL22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/drc/IslamMDLGSWSDTL22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/drc/drc2022.html#IslamMDLGSWSDTL22>
rdfs:seeAlso <https://doi.org/10.1109/DRC55272.2022.9855795>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/drc>
dc:title Thermal stability of ALD-grown SiO2 and Al2O3 on (010) ő≤-Ga2O3 substrates. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document