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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/esscirc/RawatBMVWHRL21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amita_Rawat>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bjorn_Vermeersch>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Changze_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Geert_Hellings>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hao_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Julien_Ryckaert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Krishna_K._Bhuwalka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philippe_Matagne>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FESSCIRC53450.2021.9567879>
foaf:homepage <https://doi.org/10.1109/ESSCIRC53450.2021.9567879>
dc:identifier DBLP conf/esscirc/RawatBMVWHRL21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FESSCIRC53450.2021.9567879 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amita_Rawat>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bjorn_Vermeersch>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Changze_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Geert_Hellings>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hao_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Julien_Ryckaert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Krishna_K._Bhuwalka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philippe_Matagne>
swrc:pages 55-58 (xsd:string)
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/esscirc/esscirc2021.html#RawatBMVWHRL21>
rdfs:seeAlso <https://doi.org/10.1109/ESSCIRC53450.2021.9567879>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/esscirc>
dc:title Performance Trade-Off Scenarios for GAA Nanosheet FETs Considering Inner-spacers and Epi-induced Stress: Understanding & Mitigating Process Risks. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document