Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement.
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/essderc/HudeczekB21
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Peter_Baumgartner_0005
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Richard_Hudeczek
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FESSDERC53440.2021.9631769
>
foaf:
homepage
<
https://doi.org/10.1109/ESSDERC53440.2021.9631769
>
dc:
identifier
DBLP conf/essderc/HudeczekB21
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FESSDERC53440.2021.9631769
(xsd:string)
dcterms:
issued
2021
(xsd:gYear)
rdfs:
label
Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Peter_Baumgartner_0005
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Richard_Hudeczek
>
swrc:
pages
211-214
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/essderc/2021
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/essderc/HudeczekB21/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/essderc/HudeczekB21
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/essderc/essderc2021.html#HudeczekB21
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ESSDERC53440.2021.9631769
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/essderc
>
dc:
title
Mechanical Band Gap Formation in Anisotropic CMOS Back-End-of-Line Stacks for Monolithic High-Q MEMS Resonator Confinement.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document