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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/essderc/LittaHO13>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eugenio_Dentoni_Litta>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mikael_%E2%88%9A%C4%96stling>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Per-Erik_Hellstr%E2%88%9A%E2%88%82m>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FESSDERC.2013.6818842>
foaf:homepage <https://doi.org/10.1109/ESSDERC.2013.6818842>
dc:identifier DBLP conf/essderc/LittaHO13 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FESSDERC.2013.6818842 (xsd:string)
dcterms:issued 2013 (xsd:gYear)
rdfs:label Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eugenio_Dentoni_Litta>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mikael_%E2%88%9A%C4%96stling>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Per-Erik_Hellstr%E2%88%9A%E2%88%82m>
swrc:pages 155-158 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/essderc/2013>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/essderc/LittaHO13/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/essderc/LittaHO13>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/essderc/essderc2013.html#LittaHO13>
rdfs:seeAlso <https://doi.org/10.1109/ESSDERC.2013.6818842>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/essderc>
dc:title Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document