Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/essderc/LittaHO13
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Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs.
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Mobility enhancement by integration of TmSiO IL in 0.65nm EOT high-k/metal gate MOSFETs.
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