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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/essderc/ShiSCCSSSMLH18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._Sidelnicov>
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dc:creator <https://dblp.l3s.de/d2r/resource/authors/David_L._Harame>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Frank_Schlaphof>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._M._M._dos_Santos>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinglin_Shi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_R._Long>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kok_Wai_J._Chew>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lutz_Meinshausen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mei_See_Chin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FESSDERC.2018.8486905>
foaf:homepage <https://doi.org/10.1109/ESSDERC.2018.8486905>
dc:identifier DBLP conf/essderc/ShiSCCSSSMLH18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FESSDERC.2018.8486905 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
rdfs:label Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._Sidelnicov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/C._Schippel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/David_L._Harame>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Frank_Schlaphof>
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foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_R._Long>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kok_Wai_J._Chew>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lutz_Meinshausen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mei_See_Chin>
swrc:pages 190-193 (xsd:string)
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rdfs:seeAlso <https://doi.org/10.1109/ESSDERC.2018.8486905>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/essderc>
dc:title Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document