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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/europar/WebsterGRC02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jean-Fran%E2%88%9A%C3%9Fois_Remacle>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Matthias_K._Gobbert>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Samuel_G._Webster>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Timothy_S._Cale>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F3-540-45706-2%5F61>
foaf:homepage <https://doi.org/10.1007/3-540-45706-2_61>
dc:identifier DBLP conf/europar/WebsterGRC02 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F3-540-45706-2%5F61 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note). (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jean-Fran%E2%88%9A%C3%9Fois_Remacle>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Matthias_K._Gobbert>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Samuel_G._Webster>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Timothy_S._Cale>
swrc:pages 452-456 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/europar/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/europar/WebsterGRC02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/europar/WebsterGRC02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/europar/europar2002.html#WebsterGRC02>
rdfs:seeAlso <https://doi.org/10.1007/3-540-45706-2_61>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/europar>
dc:title Parallel Numerical Solution of the Boltzmann Equation for Atomic Layer Deposition (Research Note). (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document