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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/fskd/ShengP11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bi-Qi_Sheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tian-Hong_Pan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FFSKD.2011.6019961>
foaf:homepage <https://doi.org/10.1109/FSKD.2011.6019961>
dc:identifier DBLP conf/fskd/ShengP11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FFSKD.2011.6019961 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Virtual metrology algorithm for TFT-LCD manufacutring process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bi-Qi_Sheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tian-Hong_Pan>
swrc:pages 2142-2145 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/fskd/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/fskd/ShengP11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/fskd/ShengP11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/fskd/fskd2011.html#ShengP11>
rdfs:seeAlso <https://doi.org/10.1109/FSKD.2011.6019961>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/fskd>
dc:title Virtual metrology algorithm for TFT-LCD manufacutring process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document