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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/gecco/FriscoBB19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pierluigi_Frisco>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_B%E2%88%9A%C2%A7ck>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Timo_Bootsma>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F3319619.3321931>
foaf:homepage <https://doi.org/10.1145/3319619.3321931>
dc:identifier DBLP conf/gecco/FriscoBB19 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F3319619.3321931 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pierluigi_Frisco>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_B%E2%88%9A%C2%A7ck>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Timo_Bootsma>
swrc:pages 365-366 (xsd:string)
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owl:sameAs <http://dblp.rkbexplorer.com/id/conf/gecco/FriscoBB19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/gecco/gecco2019c.html#FriscoBB19>
rdfs:seeAlso <https://doi.org/10.1145/3319619.3321931>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/gecco>
dc:title Multi-objective genetic algorithms for reducing mark read-out effort in lithographic tests. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document