Design of Processing Chamber Based on the Flow Uniformity.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/gi/HuangYLHZH14
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/gi/HuangYLHZH14
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chang-ming_Li
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Hui_Huang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Qi-li_Zhang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Shu-guang_Hou
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Tie-niu_Yang
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Zun-di_Huang
>
foaf:
homepage
<
https://dl.gi.de/handle/20.500.12116/2829
>
dc:
identifier
DBLP conf/gi/HuangYLHZH14
(xsd:string)
dcterms:
issued
2014
(xsd:gYear)
rdfs:
label
Design of Processing Chamber Based on the Flow Uniformity.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chang-ming_Li
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Hui_Huang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Qi-li_Zhang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Shu-guang_Hou
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Tie-niu_Yang
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Zun-di_Huang
>
swrc:
pages
2037-2042
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/gi/2014
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/gi/HuangYLHZH14/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/gi/HuangYLHZH14
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/gi/gi2014.html#HuangYLHZH14
>
rdfs:
seeAlso
<
https://dl.gi.de/handle/20.500.12116/2829
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/gi
>
dc:
title
Design of Processing Chamber Based on the Flow Uniformity.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document