Impact of dummy filling techniques on interconnect capacitance and planarization in nano-scale process technology.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/glvlsi/NieuwoudtKM08
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2008
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Impact of dummy filling techniques on interconnect capacitance and planarization in nano-scale process technology.
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design for manufacturability, dummy fill
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Impact of dummy filling techniques on interconnect capacitance and planarization in nano-scale process technology.
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