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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iccS/ZudilovaB02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Elena_V._Zudilova>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Maxim_O._Borisov>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2F3-540-46043-8%5F31>
foaf:homepage <https://doi.org/10.1007/3-540-46043-8_31>
dc:identifier DBLP conf/iccS/ZudilovaB02 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2F3-540-46043-8%5F31 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label 3D Mesh Generation for the Results of Anisotropic Etch Simulation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Elena_V._Zudilova>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Maxim_O._Borisov>
swrc:pages 316-323 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iccS/2002-1>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iccS/ZudilovaB02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iccS/ZudilovaB02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iccS/iccS2002-1.html#ZudilovaB02>
rdfs:seeAlso <https://doi.org/10.1007/3-540-46043-8_31>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iccS>
dc:title 3D Mesh Generation for the Results of Anisotropic Etch Simulation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document