Extraction and LVS for mixed-domain integrated MEMS layouts.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/iccad/BaidyaM02
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Extraction and LVS for mixed-domain integrated MEMS layouts.
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MEMS LVS, MEMS extraction, integrated MEMS, parasitics, verification
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Extraction and LVS for mixed-domain integrated MEMS layouts.
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