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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iccad/DeA03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Narayan_R._Aluru>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._K._De>
foaf:homepage <http://dx.doi.org/doi.ieeecomputersociety.org%2F10.1109%2FICCAD.2003.1257674>
foaf:homepage <https://doi.ieeecomputersociety.org/10.1109/ICCAD.2003.1257674>
dc:identifier DBLP conf/iccad/DeA03 (xsd:string)
dc:identifier DOI doi.ieeecomputersociety.org%2F10.1109%2FICCAD.2003.1257674 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label Physical And Reduced-Order Dynamic Analysis of MEMS. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Narayan_R._Aluru>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._K._De>
swrc:pages 270-274 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iccad/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iccad/DeA03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iccad/DeA03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iccad/iccad2003.html#DeA03>
rdfs:seeAlso <https://doi.ieeecomputersociety.org/10.1109/ICCAD.2003.1257674>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iccad>
dc:subject MEMS, dynamics, resonant frequency, switching speed and power, reduced order modeling (xsd:string)
dc:title Physical And Reduced-Order Dynamic Analysis of MEMS. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document