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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/iccad/KahngSZ06>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alexander_Zelikovsky>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_B._Kahng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Puneet_Sharma>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F1233501.1233639>
foaf:homepage <https://doi.org/10.1145/1233501.1233639>
dc:identifier DBLP conf/iccad/KahngSZ06 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F1233501.1233639 (xsd:string)
dcterms:issued 2006 (xsd:gYear)
rdfs:label Fill for shallow trench isolation CMP. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alexander_Zelikovsky>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_B._Kahng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Puneet_Sharma>
swrc:pages 661-668 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/iccad/2006>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/iccad/KahngSZ06/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/iccad/KahngSZ06>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/iccad/iccad2006.html#KahngSZ06>
rdfs:seeAlso <https://doi.org/10.1145/1233501.1233639>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/iccad>
dc:title Fill for shallow trench isolation CMP. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document